Untersuchungen zur Entwicklung und technologischen Herstellung von kostengünstigen Mikrospiegelarrays zur Tageslichtlenkung

Li, Qingdang

kassel university press, ISBN: 978-3-86219-070-6, 2011, 155 Pages

Zugl.: Kassel, Univ., Diss. 2010

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Content: This present dissertation systematically analyzes the development, modeling and production of low-cost micro mirror arrays for daylight guiding.

In the preliminary works such a design concept and a technological production process for micro mirror arrays for daylight at the Institute of Nanostructure Technologies and Analytics had been developed. These have been further de-veloped and improved in this thesis.

Based on the available methods of designs and technologies of production in micro systems, different micro mirror models concerning their mechanical, optical and electrical properties are evaluated.

In addition, by using test samples, the layer systems are analyzed and ascertained. By way of model analysis and calculation, different designs of micro mirrors in various dimensions and geometries are obtained. Based on the derived results the photo masks are implemented.

By the combination of such layer systems and different production technologies this dissertation reveals more implementation concepts in two series (se-ries A: "SiO2 and Si3N4 as a carrier layer" and series B: "multi-metal layer structures as carrier-/mirror layer"), in which the production processes from design to finished samples of micro mirror arrays are included. By implementing these concepts different samples in the laboratory scale can be produced. In this work the production processes of some representative solutions from the series A and B are presented in detail.

The obtained results are again compared with the developed theoretical models and evaluated via a scoring model analysis.

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